JPH0252830U - - Google Patents
Info
- Publication number
- JPH0252830U JPH0252830U JP13172788U JP13172788U JPH0252830U JP H0252830 U JPH0252830 U JP H0252830U JP 13172788 U JP13172788 U JP 13172788U JP 13172788 U JP13172788 U JP 13172788U JP H0252830 U JPH0252830 U JP H0252830U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- temperature
- treatment furnace
- clamp member
- clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 3
- 230000007613 environmental effect Effects 0.000 claims 2
- 239000012781 shape memory material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Landscapes
- Chain Conveyers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13172788U JPH0252830U (en]) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13172788U JPH0252830U (en]) | 1988-10-11 | 1988-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0252830U true JPH0252830U (en]) | 1990-04-17 |
Family
ID=31388061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13172788U Pending JPH0252830U (en]) | 1988-10-11 | 1988-10-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0252830U (en]) |
-
1988
- 1988-10-11 JP JP13172788U patent/JPH0252830U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0252830U (en]) | ||
JPH0314723B2 (en]) | ||
JPH0632686Y2 (ja) | 半導体チップ用ウェハの取付け装置 | |
JPH0469464U (en]) | ||
JPH041016Y2 (en]) | ||
CA2403643A1 (en) | Device for conveying flat objects | |
JPH0234822Y2 (en]) | ||
JPS6074544A (ja) | ウエハの着脱方法 | |
JPH021144A (ja) | 把持装置 | |
JPH08255849A (ja) | チップを収納したパッケ−ジのキャップ仮止め用治具とキャップ接合装置およびその方法 | |
JPH0717151Y2 (ja) | ウエハ保持装置 | |
JPH04177839A (ja) | 半導体基板加熱装置 | |
JPH0577180B2 (en]) | ||
JPS62201655U (en]) | ||
JPH0369112A (ja) | ホットプレートオーブン | |
JPH0214363U (en]) | ||
JPH0714910A (ja) | 被処理物搬送プレート | |
JPS63137938U (en]) | ||
JPS60119526U (ja) | 熱可塑性樹脂の単板シ−ト材の加熱装置 | |
JPH07157081A (ja) | ウェハ搬送機構 | |
JPH0737592U (ja) | 産業用ロボットにおけるハンド装置 | |
JPS59112826U (ja) | 物品の搬送装置 | |
JPH0412647U (en]) | ||
JPS6335991U (en]) | ||
JPH01110268U (en]) |